Monografie
Synthesis of compliant single crystal silicon mechanisms with large deformation
- Sprache
-
Englisch
- Umfang
-
124 S.
- Anmerkungen
-
Zugl.: Freiburg (Breisgau), Univ., Diss., 2009
- ISBN
-
978-3-89959-898-8
- Identifier
-
995862664
- Reihe
-
Microactuators - design and technology; Vol. 3
Thema
Kippspiegel ; Mikrooptik ; MEMS ; Mikroaktor ; Silicium ; Einkristall ; Hochschulschrift
Beteiligte Personen und Organisationen
Chen, Tzung-Ming
- Inhaltsverzeichnis
- Rechteinformation
-
Der Zugriff auf Teile des Objekts ist unbeschränkt möglich.
- Letzte Aktualisierung
-
16.08.2023, 18:33 MESZ
Objekttyp
- Monografie
Beteiligte
- Chen, Tzung-Ming
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