Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2045-2322
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films ; volume:12 ; number:1 ; day:8 ; month:7 ; year:2022 ; pages:1-8 ; date:12.2022
Scientific reports ; 12, Heft 1 (8.7.2022), 1-8, 12.2022
- Creator
-
Park, Soobin
Seo, Jinmyeong
Park, Jungjoon
Hwang, Inseong
Lee, Han-Seung
Jung, Hyunsung
Yoo, Bongyoung
- Contributor
-
SpringerLink (Online service)
- DOI
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10.1038/s41598-022-15955-4
- URN
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urn:nbn:de:101:1-2022083023344960888233
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:31 AM CEST
Data provider
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Associated
- Park, Soobin
- Seo, Jinmyeong
- Park, Jungjoon
- Hwang, Inseong
- Lee, Han-Seung
- Jung, Hyunsung
- Yoo, Bongyoung
- SpringerLink (Online service)
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