Implementation and experiment of a novel piezoelectric-spring stage for rapid high-precision micromotion
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
1432-1858
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Implementation and experiment of a novel piezoelectric-spring stage for rapid high-precision micromotion ; day:27 ; month:11 ; year:2020 ; pages:1-12
Microsystem technologies ; (27.11.2020), 1-12
- Urheber
-
Zhang, Lanyu
Gao, Jian
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s00542-020-05092-1
- URN
-
urn:nbn:de:101:1-2021010719124916257648
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 15.08.2025, 07:38 MESZ
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Beteiligte
- Zhang, Lanyu
- Gao, Jian
- SpringerLink (Online service)
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