Plasma-deposited fluoropolymer film mask for local porous silicon formation

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Plasma-deposited fluoropolymer film mask for local porous silicon formation ; volume:7 ; number:1 ; day:26 ; month:6 ; year:2012 ; pages:1-6 ; date:12.2012
Nanoscale research letters ; 7, Heft 1 (26.6.2012), 1-6, 12.2012

Creator
Defforge, Thomas
Capelle, Marie
Tran-Van, François
Gautier, Gaël
Contributor
SpringerLink (Online service)

DOI
10.1186/1556-276X-7-344
URN
urn:nbn:de:101:1-2019101521514512901317
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:28 AM CEST

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Associated

  • Defforge, Thomas
  • Capelle, Marie
  • Tran-Van, François
  • Gautier, Gaël
  • SpringerLink (Online service)

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