Phosphorous Catalytic‐Doping of Silicon Alloys for the Use in Silicon Heterojunction Solar Cells
Herein, the effectiveness of post‐deposition catalytic‐doping (cat‐doping) on various doped silicon alloys, i.e., microcrystalline silicon (μc‐Si:H), nanocrystalline silicon oxide (nc‐SiOx:H), and microcrystalline silicon carbide (μc‐SiC:H), for the use in silicon heterojunction solar cells is investigated. Phosphorous (P) profiles by secondary ion mass spectrometry (SIMS) reveal the P distribution and its difference in these three silicon alloy films. Conductivity and effective charge carrier lifetime of different samples are found to increase to different extents after cat‐doping process. Coexistence of thermal annealing, hydrogenation, and phosphorus doping is confirmed by using different gases during the cat‐doping process.
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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Phosphorous Catalytic‐Doping of Silicon Alloys for the Use in Silicon Heterojunction Solar Cells ; volume:22 ; number:6 ; year:2020 ; extent:5
Advanced engineering materials ; 22, Heft 6 (2020) (gesamt 5)
- Creator
- DOI
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10.1002/adem.201900613
- URN
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urn:nbn:de:101:1-2022061712123018340587
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:32 AM CEST
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Liu, Yong
- Pomaska, Manuel
- Duan, Weiyuan
- Kim, Do Yun
- Köhler, Malte
- Breuer, Uwe
- Ding, Kaining
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Energy-efficient integrated silicon optical phased array
Amorphous silicon-crystalline silicon heterojunction solar cells
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Microstructure of metatitanic acid and its transformation to rutile titanium dioxide
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Amorphous silicon-crystalline silicon heterojunction solar cells
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