Hochschulschrift | Online-Publikation
Theoretical study of chemical vapor deposition of transition metal compounds
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
Dateien im PDF-Format
Marburg, Univ., Diss., 2001
- Classification
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Chemie
- Keyword
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Tantalpentoxid
Titannitrid
CVD-Verfahren
Quantenchemie
Rührreaktor
- Creator
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Siódmiak, Magdalena
- URN
-
urn:nbn:de:hebis:04-z2001-00846
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:55 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
- Online-Publikation
Associated
- Siódmiak, Magdalena
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Catalytic chemical vapor deposition : technology and applications of Cat-CVD
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Modeling of chemical vapor deposition of Tungsten films
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