Influence of hydrogen effusion from hydrogenated silicon nitride layers on the regeneration of boron-oxygen related defects in crystalline silicon
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Journal of Applied Physics ; 114 (2013), 19. - 194512. - ISSN 0021-8979. - eISSN 1089-7550
- Klassifikation
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Physik
- Ereignis
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Veröffentlichung
- (wo)
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Konstanz
- (wer)
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Bibliothek der Universität Konstanz
- (wann)
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2013
- Urheber
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Wilking, Svenja
Ebert, Sebastian
Herguth, Axel
Hahn, Giso
- URN
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urn:nbn:de:bsz:352-252472
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:45 MESZ
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Beteiligte
- Wilking, Svenja
- Ebert, Sebastian
- Herguth, Axel
- Hahn, Giso
- Bibliothek der Universität Konstanz
Entstanden
- 2013
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