Influence of hydrogen effusion from hydrogenated silicon nitride layers on the regeneration of boron-oxygen related defects in crystalline silicon
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Journal of Applied Physics ; 114 (2013), 19. - 194512. - ISSN 0021-8979. - eISSN 1089-7550
- Classification
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Physik
- Event
-
Veröffentlichung
- (where)
-
Konstanz
- (who)
-
Bibliothek der Universität Konstanz
- (when)
-
2013
- Creator
-
Wilking, Svenja
Ebert, Sebastian
Herguth, Axel
Hahn, Giso
- URN
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urn:nbn:de:bsz:352-252472
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 14.08.2025, 10:45 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Wilking, Svenja
- Ebert, Sebastian
- Herguth, Axel
- Hahn, Giso
- Bibliothek der Universität Konstanz
Time of origin
- 2013
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