Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks

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Alternative title: Ab Initio Modellierung der Chemischen Gasphasen- und Flächenselektiven Atomlagenabscheidung - Entwicklung einer Automatisierten Erkundung von Oberflächenreaktionsnetzwerken

Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: Marburg, Philipps-Universität Marburg, Dissertation, 2022

Event: Veröffentlichung

(where): Marburg

(who): Philipps-Universität Marburg

(when): 2023

Creator: Pieck, Fabian

Contributor: Tonner-Zech, Ralf

DOI: 10.17192/z2023.0086

URN: urn:nbn:de:hebis:04-z2023-00863

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:58 AM CEST

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Associated

Pieck, Fabian
Tonner-Zech, Ralf
Philipps-Universität Marburg

Time of origin

2023

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Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks

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Time of origin

Other Objects (12)

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