Hochschulschrift
Formation of aluminium nitride by plasma immersion ion implantation
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783898202701
3898202704
- Dimensions
-
21 cm
- Extent
-
109 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Augsburg, Univ., Diss., 2001
- Keyword
-
Aluminiumnitrid
Plasma-Immersions-Implantation
- Event
-
Veröffentlichung
- (where)
-
Berlin
- (who)
-
Mensch-und-Buch-Verl.
- (when)
-
2001
- Creator
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 11:51 AM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Manova, Darina Ilcheva
- Mensch-und-Buch-Verl.
Time of origin
- 2001
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Phase formation of photoactive TiO2 thin films by metal plasma immersion ion implantation and deposition
Structural characterization of ion implanted gallium nitride
Ion nitriding of aluminium
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Energy filter for ion implantation
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Prospects and challenges in high-temperature annealing of aluminium nitride