Hochschulschrift
Characterization of silicon membrane wafers and optimization of their process stability for ultra-thin chip fabrication
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783862472291
- Maße
-
21 cm
- Umfang
-
158 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Stuttgart, Univ., Diss., 2011
- Klassifikation
-
Elektrotechnik, Elektronik
- Schlagwort
-
Chip
Dünnschichttechnik
Mikrometerbereich
Silicium
Poröser Stoff
Halbleitersubstrat
Wafer
Technische Membran
CMOS
- Ereignis
-
Veröffentlichung
- (wo)
-
Uelvesbüll
- (wer)
-
Der Andere Verl.
- (wann)
-
2012
- Urheber
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:59 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Hochschulschrift
Beteiligte
- Angelopoulos, Evangelos
- Der Andere Verl.
Entstanden
- 2012
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